A new SIMS instrument for submicron microarea analysis

✍ Scribed by S. Nomura; H. Shichi; E. Mitani; E. Izumi

• Book ID: 104592594
• Publisher: John Wiley and Sons
• Year: 1990
• Tongue: English
• Weight: 379 KB
• Volume: 16
• Category: Article
• ISSN: 0142-2421
• DOI: 10.1002/sia.740160122

✦ Synopsis

Abstract

A new type of SIMS instrument has been developed for submicron microarea analysis. The instrument is incorporated with an electron beam, which provides scanning electron microscopy (SEM) images of a sample. The operator determines the area to be analysed by observing the SEM image without damaging the sample, then switches the electron beam to an ion beam and carries out a SIMS analysis of that area. Electron and ion Beams with diameters of <20 nm and <70 nm, respectively, are focused on the sample. Some application data of the micro‐area elemental analysis are presented.