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A new LEED instrument for quantitative spot profile analysis

✍ Scribed by U. Scheithauer; G. Meyer; M. Henzler

Book ID
118986970
Publisher
Elsevier Science
Year
1986
Tongue
English
Weight
592 KB
Volume
178
Category
Article
ISSN
0039-6028

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A new SIMS instrument for submicron micr
A new SIMS instrument for submicron microarea analysis
✍ S. Nomura; H. Shichi; E. Mitani; E. Izumi πŸ“‚ Article πŸ“… 1990 πŸ› John Wiley and Sons 🌐 English βš– 379 KB

## Abstract A new type of SIMS instrument has been developed for submicron microarea analysis. The instrument is incorporated with an electron beam, which provides scanning electron microscopy (SEM) images of a sample. The operator determines the area to be analysed by observing the SEM image witho