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A new selective MOVPE regrowth process utilizing in-situ vapor phase etching for optoelectronic integrated circuits

✍ Scribed by Kenji Shimoyama; Yuichi Inoue; Masanori Katoh; Hideki Gotoh; Yoshihiro Suzuki; Hiroyoshi Yajima

Book ID: 103167644
Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 243 KB
Volume: 107
Category: Article
ISSN: 0022-0248
DOI: 10.1016/0022-0248(91)90555-j

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