A new sacrificial layer method of LIGA technology to fabricate movable part of a gripper

✍ Scribed by F. Yi; E. Tang; J. Zhang; D. Xian

• Book ID: 106186387
• Publisher: Springer-Verlag
• Year: 2000
• Tongue: English
• Weight: 188 KB
• Volume: 6
• Category: Article
• ISSN: 0946-7076
• DOI: 10.1007/s005420050186