A new type of scanning electron microsco
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C.Z Jiang; P Morin; N Rosenberg
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Article
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2002
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Elsevier Science
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English
β 394 KB
A new coaxial detection system for backscattered electrons in SEM is described. This coaxial detection system allows us to collect only the backscattered electrons that have lost a small percentage of the primary energy, emerging from the sample surface with a take-off angle defined by the objective