A new model for Si {100} convex corner undercutting in anisotropic KOH etching

✍ Scribed by Schröder, H; Obermeier, E

• Book ID: 126061704
• Publisher: Institute of Physics
• Year: 2000
• Tongue: English
• Weight: 463 KB
• Volume: 10
• Category: Article
• ISSN: 0960-1317
• DOI: 10.1088/0960-1317/10/2/311