✦ LIBER ✦
Fabrication of Non-Underetched Convex Corners in Anisotropic Etching of (100)-Silicon in Aqueous KOH with Respect to Novel Micromechanic Elements
✍ Scribed by Mayer, G. K.
- Book ID
- 119955645
- Publisher
- The Electrochemical Society
- Year
- 1990
- Tongue
- English
- Weight
- 999 KB
- Volume
- 137
- Category
- Article
- ISSN
- 0013-4651
No coin nor oath required. For personal study only.