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A New Method of Calculations of Double-Aperture Electrostatic Immersion Lenses

โœ Scribed by Kodama, Masao


Book ID
115468915
Publisher
Institute of Pure and Applied Physics
Year
1980
Tongue
English
Weight
163 KB
Volume
19
Category
Article
ISSN
0021-4922

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We have fabricated arrays of silicon membranes and structures such as silicon contact pads and interconnecting silicon-wires on borosilicate glass as carrier material and isolator. We propose a new method to align and assemble these basic modules to form electrostatic electron optical components suc