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A new method for thin-film thickness measurement using PIXE

✍ Scribed by J. Miranda; A. Oliver; E.C. Montenegro


Book ID
113279521
Publisher
Elsevier Science
Year
1989
Tongue
English
Weight
530 KB
Volume
43
Category
Article
ISSN
0168-583X

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Multilayer thin film thickness measureme
✍ Xing-zhi Gong; Liang Cheng; Fei-hong Yu πŸ“‚ Article πŸ“… 2010 πŸ› Elsevier Science 🌐 English βš– 793 KB

This paper, for the first time, proposed a new sensitivity separation (SS) method for measuring thicknesses of multilayer thin-film stack with high efficiency and accuracy. Through the analysis of the relationship between the film parameters and the mean misfit error (MSE), a parameter called sensit