A new fabrication process for ultra-thick microfluidic microstructures utilizing SU-8 photoresist

✍ Scribed by Lin, Che-Hsin; Lee, Gwo-Bin; Chang, Bao-Wen; Chang, Guan-Liang

• Book ID: 124068465
• Publisher: Institute of Physics
• Year: 2002
• Tongue: English
• Weight: 807 KB
• Volume: 12
• Category: Article
• ISSN: 0960-1317
• DOI: 10.1088/0960-1317/12/5/312