✦ LIBER ✦
A new fabrication process for uniform SU-8 thick photoresist structures by simultaneously removing edge bead and air bubbles
✍ Scribed by Lee, Hun; Lee, Kangsun; Ahn, Byungwook; Xu, Jing; Xu, Linfeng; Oh, Kwang W
- Book ID
- 120385049
- Publisher
- Institute of Physics
- Year
- 2011
- Tongue
- English
- Weight
- 899 KB
- Volume
- 21
- Category
- Article
- ISSN
- 0960-1317
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