Polarized electrochemical vapor depositi
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Eric Z. Tang; Thomas H. Etsell
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Article
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1996
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Elsevier Science
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English
โ 553 KB
As a modified form of chemical vapor deposition (CVD) and electrochemical vapor deposition (EVD), polarized electrochemical vapor deposition (PEVD) utilizes a d.c. bias potential to create an electrochemical potential difference inside an ionic conductor under a polarized condition. The gas electrod