In this paper, a new type of noncontact/nondestructive measuring method has been developed, comprising a new optical probe, precision stages, and controllers. The new optical probe has been designed using the reflected slit beam through the optical window. The optical measurement system has been imp
A new e-beam method for grey scale 3D optical elements
β Scribed by V.A. Kudryashov; P.D. Prewett; A.G. Michette
- Publisher
- Elsevier Science
- Year
- 1999
- Tongue
- English
- Weight
- 763 KB
- Volume
- 46
- Category
- Article
- ISSN
- 0167-9317
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