A new class of positive electron beam resists: methyl methacrylate-styrene and butyl methacrylate-styrene comb copolymers

✍ Scribed by Masood Bakhshaee; David Hayward; Stanley Affrossman; David C. Sherrington; Richard A. Pethrick

• Publisher: Elsevier Science
• Year: 1988
• Tongue: English
• Weight: 499 KB
• Volume: 29
• Category: Article
• ISSN: 0032-3861
• DOI: 10.1016/0032-3861(88)90303-5