A new application of soft X-ray spectroscopy to a non-destructive analysis of a film/substrate contact system: Carbonized-layer (ultra-thin-film)/Si(100)

✍ Scribed by M. Iwami; M. Kusaka; M. Hirai; H. Nakamura; K. Shibahara; H. Matsunami

• Book ID: 118362542
• Publisher: Elsevier Science
• Year: 1988
• Tongue: English
• Weight: 791 KB
• Volume: 199
• Category: Article
• ISSN: 0039-6028
• DOI: 10.1016/0039-6028(88)90915-6