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A new non-destructive analysis of semiconductor heterojunctions with very thin surface layers: An application of soft x-ray spectroscopy to Si-compound (film)/Si (substrate)

✍ Scribed by M. Iwami; M. Kusaka; M. Hirai; H. Nakamura


Book ID
107925702
Publisher
Elsevier Science
Year
1990
Tongue
English
Weight
354 KB
Volume
41-42
Category
Article
ISSN
0169-4332

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