✦ LIBER ✦

A new alignment technique for steppers: Hybrid marks®

✍ Scribed by L. Auzino; A. Cangiano

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

A new optical heterodyne alignment and g

✍ Katsuhiro Kato; Tohru Itoh; Nobufumi Atoda 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 370 KB

Heterodyne holographic nanometer alignme

✍ N. Nomura; K. Yamashita; K. Kubo; Y. Yamada; M. Suzuki 📂 Article 📅 1990 🏛 Elsevier Science 🌐 English ⚖ 222 KB

An alignment technique for a ring laser

✍ Z.-H. Fang; H. Thienpont 📂 Article 📅 1984 🏛 Elsevier Science 🌐 English ⚖ 136 KB

A simple technique for crystal alignment

✍ P.B. Price; M.J. Hollis; C.S. Newton 📂 Article 📅 1973 🏛 Elsevier Science ⚖ 120 KB

A simple technique for the alignment of

✍ J.S. Uppal; J.C. Monga; D.D. Bhawalkar 📂 Article 📅 1985 🏛 Elsevier Science 🌐 English ⚖ 213 KB

A technique for the alignment of a ring

✍ Zun-Jiang Zhang 📂 Article 📅 1988 🏛 Elsevier Science 🌐 English ⚖ 143 KB