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A net-shape fabrication process of alumina micro-components using a soft lithography technique

✍ Scribed by Zhu, Zhigang; Wei, Xueyong; Jiang, Kyle

Book ID: 126936038
Publisher: Institute of Physics
Year: 2006
Tongue: English
Weight: 541 KB
Volume: 17
Category: Article
ISSN: 0960-1317
DOI: 10.1088/0960-1317/17/2/002

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