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A nanoindentation study of thick cBN films prepared by chemical vapor deposition

โœ Scribed by C.Y Chan; W.J Zhang; S Matsumoto; I Bello; S.T Lee

Book ID
108341787
Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
707 KB
Volume
247
Category
Article
ISSN
0022-0248

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Ca-Si-O films were prepared by chemical vapor deposition using calcium dipivaloylmethanates (Ca(dpm) 2 ) and tetraethyl orthosilicate (TEOS). The effects of the Si to Ca precursor molar ratio (R Si/Ca ) and the substrate temperature (T sub ) on the crystal phase, microstructure and deposition rate o