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A modified method for arc deposition of Ti-N thin films

✍ Scribed by J Kourtev; R Pascova; E Weiβmantel

Publisher: Elsevier Science
Year: 1997
Tongue: English
Weight: 695 KB
Volume: 48
Category: Article
ISSN: 0042-207X
DOI: 10.1016/s0042-207x(96)00232-1

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