A model of an optical roughness-measurin
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Aaron B. Kiely; Thomas R. Lettieri; Theodore V. Vorburger
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Article
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1992
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Elsevier Science
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English
⚖ 218 KB
## SUm~AR% We havE~ developed a nonlinear model of a commercial optical instrument for measuring the root-mean-square slopes of rough surfaces. The model improves upon previous ones in that it accounts for certain instrumental factors which affect the optical roughness measurements.