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A microprocessor-controlled magnetron system for sputtering optical films

✍ Scribed by P.J. Chandler; P.R. Meek; L. Holland

Publisher: Elsevier Science
Year: 1981
Tongue: English
Weight: 530 KB
Volume: 86
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(81)90287-x

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