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A micromachined silicon depth probe for multichannel neural recording

✍ Scribed by Tae Hwan Yoon; Eun Jung Hwang; Dong Yong Shin; Se Ik Park; Seung Jae Oh; Sung Cherl Jung; Hyung Cheul Shin; Sung June Kim


Book ID
114530920
Publisher
IEEE
Year
2000
Tongue
English
Weight
433 KB
Volume
47
Category
Article
ISSN
0018-9294

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## Abstract A novel type of slit probe incorporating a micromachined silicon (Si) chip for millimeter‐wave scanning near‐field microscopy is proposed.To improve the spatial resolution and image contrast attainable in millimeter‐wave microscopy, a metal‐coated Si chip with a microslit aperture fabri