Near-field slit probe incorporating a micromachined silicon chip for millimeter-wave microscopy
✍ Scribed by Tatsuo Nozokido; Noriyuki Miyasaka; Jongsuck Bae
- Publisher
- John Wiley and Sons
- Year
- 2011
- Tongue
- English
- Weight
- 849 KB
- Volume
- 53
- Category
- Article
- ISSN
- 0895-2477
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✦ Synopsis
Abstract
A novel type of slit probe incorporating a micromachined silicon (Si) chip for millimeter‐wave scanning near‐field microscopy is proposed.To improve the spatial resolution and image contrast attainable in millimeter‐wave microscopy, a metal‐coated Si chip with a microslit aperture fabricated using a bulk micromachining technique was attached to the tip of an ordinary slit‐type probe at the end of a tapered rectangular waveguide. The design and fabrication of the Si chip are described, and the results from experiments performed at U‐band (40–60 GHz) frequencies to demonstrate the feasibility of this new probe configuration are presented. © 2011 Wiley Periodicals, Inc. Microwave Opt Technol Lett 53:660–664, 2011; View this article online at wileyonlinelibrary.com. DOI 10.1002/mop.25793