## Abstract A novel type of slit probe incorporating a micromachined silicon (Si) chip for millimeter‐wave scanning near‐field microscopy is proposed.To improve the spatial resolution and image contrast attainable in millimeter‐wave microscopy, a metal‐coated Si chip with a microslit aperture fabri
✦ LIBER ✦
A micromachined silicon-based probe for a scanning near-field optical microscope on-chip
✍ Scribed by Bargiel, Sylwester; Heinis, Dominique; Gorecki, Christophe; Górecka-Drzazga, Anna; Dziuban, Jan A; Józwik, Michał
- Book ID
- 121393345
- Publisher
- Institute of Physics
- Year
- 2005
- Tongue
- English
- Weight
- 640 KB
- Volume
- 17
- Category
- Article
- ISSN
- 0957-0233
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