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A micromachined gas sensor based on a catalytic thick film/SnO2 thin film bilayer and thin film heater: Part 1: CH4 sensing

โœ Scribed by Takuya Suzuki; Kenji Kunihara; Mitsuo Kobayashi; Soichi Tabata; Katsuki Higaki; Hisao Ohnishi


Book ID
108263478
Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
259 KB
Volume
109
Category
Article
ISSN
0925-4005

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A selective CH4 sensor using semiconduct
โœ Maximilian Fleischer; Hans Meixner ๐Ÿ“‚ Article ๐Ÿ“… 1995 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 400 KB

Ga,O, thin films have been developed as advantageous base materials for sensors to detect reducing gases. Due to the large operating temperature range of the sensors, a temperature-programmed setting of the gas sensitivity is possible. CH, detection at 420 "C demonstrates the known problems with met