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A method of gap control based on the principle of equal thickness interference for HARNS fabrication

✍ Scribed by Jie Zhou; Gang Liu; Xiaobo Zhang; Ying Xiong; Yangchao Tian


Publisher
Springer-Verlag
Year
2010
Tongue
English
Weight
456 KB
Volume
17
Category
Article
ISSN
0946-7076

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