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A Method for Estimating the Sheath Edge of Plasma Ion Sources

โœ Scribed by Ke, J.; Zhou, C.

Book ID
121671367
Publisher
IEEE
Year
2014
Tongue
English
Weight
725 KB
Volume
42
Category
Article
ISSN
0093-3813

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๐Ÿ“œ SIMILAR VOLUMES

A simple method for estimating effective
A simple method for estimating effective Ion source residence time
โœ K.S. Griffith; Gregory I. Gellene ๐Ÿ“‚ Article ๐Ÿ“… 1993 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 399 KB

A method is presented that uses the well-understood O2/Ax ion-molecule reaction system to determine the effective ion source residence time of a chemical ionization source. The process consists of: (1) defining the kinetic system in terms of reactions, reaction rates, and ionization cross sections;