A method for elastic modulus measurements of magnetron sputtered thin films dedicated to mechanical applications

✍ Scribed by André Rouzaud; E. Barbier; J. Ernoult; E. Quesnel

• Publisher: Elsevier Science
• Year: 1995
• Tongue: English
• Weight: 529 KB
• Volume: 270
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(95)06921-6