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A method for doping fluctuations measurement in high resistivity silicon

✍ Scribed by Castoldi, A.; Chinnici, S.; Gatti, E.; Longoni, A.; Sampietro, M.; Vacchi, A.; Rehak, P.


Book ID
117997879
Publisher
American Institute of Physics
Year
1992
Tongue
English
Weight
950 KB
Volume
71
Category
Article
ISSN
0021-8979

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