A LEED, AES and TDS study of very thin nitride film growth on Si(100) by direct thermal nitridation in NH3

✍ Scribed by A. Glachant; D. Saidi; J.F. Delord

• Book ID: 118361662
• Publisher: Elsevier Science
• Year: 1986
• Tongue: English
• Weight: 365 KB
• Volume: 168
• Category: Article
• ISSN: 0039-6028
• DOI: 10.1016/0039-6028(86)90899-x