A kinetic Monte Carlo annealing assessment of the dominant features from ion implant simulations

✍ Scribed by I. Martin-Bragado; M. Jaraiz; P. Castrillo; R. Pinacho; J.E. Rubio; J. Barbolla

• Publisher: Elsevier Science
• Year: 2004
• Tongue: English
• Weight: 93 KB
• Volume: 114-115
• Category: Article
• ISSN: 0921-5107
• DOI: 10.1016/j.mseb.2004.07.060