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A kinetic Monte Carlo annealing assessment of the dominant features from ion implant simulations

โœ Scribed by I. Martin-Bragado; M. Jaraiz; P. Castrillo; R. Pinacho; J.E. Rubio; J. Barbolla


Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
93 KB
Volume
114-115
Category
Article
ISSN
0921-5107

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