✦ LIBER ✦
Monte Carlo Simulation of the Annealing Kinetics of Oxygen Recoils Formed in Through-Oxide Implants on Silicon
✍ Scribed by Mazzone, A. M. ;Servidobi, M. ;Cembali, G.
- Publisher
- John Wiley and Sons
- Year
- 1986
- Tongue
- English
- Weight
- 391 KB
- Volume
- 94
- Category
- Article
- ISSN
- 0031-8965
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