A kalman filtering process control scheme with an application in semiconductor short run manufacturing

✍ Scribed by Enrique Del Castillo; Douglas C. Montgomery

• Book ID: 112185046
• Publisher: John Wiley and Sons
• Year: 1995
• Tongue: English
• Weight: 424 KB
• Volume: 11
• Category: Article
• ISSN: 0748-8017
• DOI: 10.1002/qre.4680110205