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A „Hybrid“ Thin-Film pH Sensor with Integrated Thick-Film Reference

✍ Scribed by Simonis, Anette; Krings, Thomas; Lüth, Hans; Wang, Joseph; Schöning, Michael J.

Book ID
121262127
Publisher
Molecular Diversity Preservation International
Year
2001
Tongue
English
Weight
544 KB
Volume
1
Category
Article
ISSN
1424-8220

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Both a pH-sensitive thin-film sensor and a thick-film reference electrode have been integrated into a hybrid sensor module that is suitable for (bio-)chemical analysis in aqueous solutions. The pH-sensitive thin-film sensor consists of a capacitive layer structure of Al/p-Si/SiO 2 /Al 2 O 3 and is p