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A hybrid mass-interconnection method by electroplating

✍ Scribed by Shu-Yau Wu


Book ID
114592818
Publisher
IEEE
Year
1978
Tongue
English
Weight
695 KB
Volume
25
Category
Article
ISSN
0018-9383

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Interconnection of specific nano-objects
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We report a widely applicable and highly controlled approach, based on electron beam lithography (EBL), to interconnect single nano-objects, previously immobilized onto solid surfaces, and to investigate the transport properties at the level of single nanostructures. In particular, a threestep EBL-p