A high-sensitivity z-axis capacitive silicon microaccelerometer with a torsional suspension

✍ Scribed by Selvakumar, A.; Najafi, K.

• Book ID: 120972808
• Publisher: IEEE
• Year: 1998
• Tongue: English
• Weight: 310 KB
• Volume: 7
• Category: Article
• ISSN: 1057-7157
• DOI: 10.1109/84.679356