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A high brightness plasma sputter heavy negative ion source

✍ Scribed by G.D. Alton; Y. Mori; A. Takagi; A. Ueno; S. Fukumoto

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

A versatile high intensity plasma sputte

✍ G.D. Alton; Y. Mori; A. Takagi; A. Ueno; S. Fukumoto 📂 Article 📅 1988 🏛 Elsevier Science 🌐 English ⚖ 317 KB

Radio frequency plasma sputter type heav

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Further evaluation of the high intensity

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