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A general lithography-free method of microscale/nanoscale fabrication and patterning on Si and Ge surfaces

✍ Scribed by Huatao Wang; Tom Wu

Book ID: 115021228
Publisher: Springer-Verlag
Year: 2012
Tongue: English
Weight: 860 KB
Volume: 7
Category: Article
ISSN: 1931-7573
DOI: 10.1186/1556-276x-7-110

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