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A general expression of the steady state composition for multicomponent system during ion sputtering

✍ Scribed by Qu Zhe

Book ID: 118986379
Publisher: Elsevier Science
Year: 1985
Tongue: English
Weight: 202 KB
Volume: 161
Category: Article
ISSN: 0039-6028
DOI: 10.1016/0039-6028(85)90719-8

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