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A general expression of the steady state composition for multicomponent system during ion sputtering

✍ Scribed by Qu Zhe

Book ID: 104193475
Publisher: Elsevier Science
Year: 1985
Weight: 197 KB
Volume: 161
Category: Article
ISSN: 0167-2584
DOI: 10.1016/0167-2584(85)90504-3

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