A fully suspended, movable, single-crystal silicon, deep submicron MOSFET for nanoelectromechanical applications

✍ Scribed by J.Jason Yao; Susanne C. Arney; Noel C. MacDonald

• Book ID: 103959703
• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 825 KB
• Volume: 40
• Category: Article
• ISSN: 0924-4247
• DOI: 10.1016/0924-4247(94)85033-x