✦ LIBER ✦
Active NEMS combining a single crystal silicon mechanical structure and an embedded MOSFET transistor for sensing and RF applications
✍ Scribed by E. Ollier; A. Berthelot; L. Duraffourg; E. Colinet; J. Arcamone; P. Renaux; D. Renaud; P. Robert; F. Casset; P. Ancey
- Book ID
- 104052785
- Publisher
- Elsevier Science
- Year
- 2011
- Tongue
- English
- Weight
- 1010 KB
- Volume
- 88
- Category
- Article
- ISSN
- 0167-9317
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