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A fully integrated optical detector with a-Si:H based color photodiodes

✍ Scribed by Watty, Krystian ;Merfort, Christian ;Seibel, Konstantin ;Schöler, Lars ;Böhm, Markus


Book ID
105365706
Publisher
John Wiley and Sons
Year
2010
Tongue
English
Weight
372 KB
Volume
207
Category
Article
ISSN
0031-8965

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✦ Synopsis


Abstract

The fabrication of an electrophoresis separation microchip with monolithic integrated excitation light source and variospectral photodiodes for absorption detection is presented in this paper. Microchip based separation techniques are essential elements in the development of fully integrated micro‐total analysis systems (µ‐TAS). An integrated microfluidic device, like an application specific lab‐on‐microchip (ALM) (Seibel et al., in: MRS Spring Meeting, San Francisco, USA, 2005 1), includes all components, necessary to perform a chemical analysis on chip and it can be used as a stand‐alone unit directly at the point of sampling. Variospectral diodes based on hydrogenated amorphous silicon (a‐Si:H) technology allow for advanced optical detection schemes, because the spectral sensitivity of the devices can be tailored to fit the emission of specific fluorescent markers. Important features of a‐Si:H variospectral photodiodes are a high dynamic range, a bias‐tunable spectral sensitivity and a very good linearity for the separation of mixed color signals.

magnified image

Principle of ALM device


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The miniaturization of chemical or biochemical analysis systems to micro-or nanoscale dimension allows dramatic acceleration of chemical processes and a high degree of parallelism. In this paper, we present a monolithically integrated application specific lab-on-microchip device (ALM) [1,2] for on-c