A fitting analysis of dry O2atmospheric pressure silicon oxidation data and correlations with film properties

✍ Scribed by C. Pavelescu; C. Cobianu; M. Bercu

• Publisher: Springer
• Year: 1985
• Tongue: English
• Weight: 239 KB
• Volume: 4
• Category: Article
• ISSN: 0261-8028
• DOI: 10.1007/bf00720513