A fast X-ray method to determine Ge content and relaxation of partly relaxed Si1–xGex layers on silicon substrates

✍ Scribed by Zaumseil, P.

• Publisher: John Wiley and Sons
• Year: 1994
• Tongue: English
• Weight: 366 KB
• Volume: 141
• Category: Article
• ISSN: 0031-8965
• DOI: 10.1002/pssa.2211410115