A dual-mode waveguide pseudo-elliptic filter with zero-shifting properties

✍ Scribed by Juseop Lee; Man Seok Uhm; In-Bok Yom; Jeong Phill Kim

• Book ID: 102522203
• Publisher: John Wiley and Sons
• Year: 2005
• Tongue: English
• Weight: 107 KB
• Volume: 47
• Category: Article
• ISSN: 0895-2477
• DOI: 10.1002/mop.21169

✦ Synopsis

High-Q one-port resonators suitable for high-performance oscillators and other applications have been proposed for LIGA fabrication. The advantage of this method is that very deep cavities with highly vertical sidewalls having optical quality roughness can be fabricated, suggesting that Q performance approaching the perfect smooth cavity is potentially feasible. Also, the simulated LIGA Q u was found to be quite promising, compared to the simulated silicon structures assuming wafer-stacking techniques. The potential advantages of smooth LIGA resonators are more dramatic at higher frequencies with reduced skin depth. And unlike wafer stacking that is required for silicon micromachining structures, such deep XRL cavity structures, or more complicated cavity-based circuits, can be realized directly by a single lithography exposure.