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A design for electrooptical detection of defect positions in semiconductors

✍ Scribed by M. Sakai; M. Takeuchi


Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
148 KB
Volume
376-377
Category
Article
ISSN
0921-4526

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## Abstract The design, synthesis, formulation, and process optimization of a new mid‐UV resist are described. The synthesis of a spectrally matched sensitizer was guided by semiempirical quantum mechanical calculations that predict the effect of structural changes on optical absorption characteris