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A deep level transient spectroscopy study of rapid thermal annealed arsenic implanted silicon

✍ Scribed by S. E. Beck; R. J. Jaccodine; C. Clark

Book ID: 112822246
Publisher: Springer US
Year: 1992
Tongue: English
Weight: 357 KB
Volume: 21
Category: Article
ISSN: 0361-5235
DOI: 10.1007/bf02670932

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