A comprehensive test sequence for the electron beam exposure system : Terrence E. Zavecz. Solid St. Technol., 106 (February 1982)

A comprehensive sequence for the electro

A comprehensive sequence for the electron beam exposure system: Terrence E. Zavecz Solid St. Technol., 106 (February 1982)

📂 Article 📅 1985 🏛 Elsevier Science 🌐 English ⚖ 102 KB

crystal growth, has made substantial progress in many areas in the last decade. Crystals with a diameter of 125mm have been grown; crystals with smaller diameters have had lengths of 150cm. Uniform resistivity profiles, including the virtual elimination of resistivity striations, can be obtained by